|
|||||||||||||||||||||||||||||||||||
|
2 Reviews
|
Average Customer Review
Share your thoughts with other customers
Create your own review
|
|
Most Helpful First | Newest First
|
|
2 of 3 people found the following review helpful:
5.0 out of 5 stars
Spectroscopic Ellipsometry and Reflectometry - A Users Guide,
By James B. Wilhelm Jr (Round Rock, Texas USA) - See all my reviews
This review is from: Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Hardcover)
Most useful book on this subject I have ever read.
5.0 out of 5 stars
Book on SE,
By Ester van Gerwen (Veldhoven, Noord-Brabant Netherlands) - See all my reviews
This review is from: Spectroscopic Ellipsometry and Reflectometry: A User's Guide (Hardcover)
A good follow up on Tompkins "A user's guide to Ellipsometry". This book deals with Spectroscopic Ellipsometry, but also covers the basics of single-wavelength ellipsometry. The book covers analysis of Thermal Oxide, PECVD SiO, SiO2, SiN, a-Si, etc. It also covers the mathematics behind the Lorentz oscillator, used in SE layer modelling.
|
|
Most Helpful First | Newest First
|
|
Spectroscopic Ellipsometry and Reflectometry: A User's Guide by Harland G. Tompkins (Hardcover - March 4, 1999)
$148.00 $123.31
In Stock | |
 
| ||
