First Sentence:
There has probably never been another technology that has developed so rapidly as microelectronics.
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Key Phrases - Statistically Improbable Phrases (SIPs):
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subsequent ion implantation, planarize the wafer surface, last process step, polycide films, ion projection system, dopant atom concentration, possible process sequence, screen oxide, photoresist etching, using photoresist mask, ion lithography, phosphorus glass, bottom resist layer, small contact holes, wafer process step, ion beam writing, chemical etching reaction, contact hole etching, metallization level, aluminium interconnects, field oxide regions, chemical dry etching, focus latitude, implantation machine, last shrink
Key Phrases - Capitalized Phrases (CAPs):
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Passivation Metal, Apparatus Cleaning, Mono-Si Fig, Substrate Fig, Thin Film Transistor
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