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Thin Film Processes, Volume 2 (Pt. 2)
 
 
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Thin Film Processes, Volume 2 (Pt. 2) [Hardcover]

Werner Kern (Author), John L. Vossen (Editor)


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Book Description

0127282513 978-0127282510 May 12, 1991
This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.

Key Features
* Provides an all-new sequel to the 1978 classic, Thin Film Processes
* Introduces new topics, and several key topics presented in the original volume are updated
* Emphasizes practical applications of major thin film deposition and etching processes
* Helps readers find the appropriate technology for a particular application

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Editorial Reviews

Review

"The editors are to be commended for producing an excellent text that should prove to be as popular as their first volume published over 20 years ago."
--George H. Sigel, Jr. in OPTICS & PHOTONICS NEWS
"The book is a welcome addition to the growing library of edited books on deposition processes."
--SOCIETY OF VACUUM COATERS
"This book does a good job of examining film deposition and etching from the process viewpoint. Explanations of basic processes and their various parameters are clearly presented, and the reader is left with a feeling of what is and is not well understood about each process. This approach, coupled with extensive references to the general literature, should make this book valuable to both beginning and advanced reseachers in the field....In short, this book should be a worthy addition to the library of anyone working in the field of thin films."
--APPLIED OPTICS
"The book will be welcomed by those who may wish to gain a broad perspective on a particular process or the techniques generally available, as well as by the specialist using such processes....The book provides an interesting juxtaposition of relatively well established procedures with quite recent and still developing techniques; it will certainly be a useful book to have around."
--VACUUM
"As a status report of technology in the preparation of electronic materials, it can serve both as a reference for those within the field and an introduction to those with related interest."
--JOURNAL OF METALS
"For those currently in the field of thin film research, this book would be an excellent appraisal and current reference tome. For the entering scientist, it would be a good source book and a quick study for present research."
--JOURNAL OF THE ELECTROCHEMICAL SOCIETY
"This book is a valuable addition to the library of the physicist, chemist, or engineer who desires to broaden his knowledge of coating processes."
--THE AUSTRALIAN PHYSICIST

Product Details

  • Hardcover: 888 pages
  • Publisher: Academic Press (May 12, 1991)
  • Language: English
  • ISBN-10: 0127282513
  • ISBN-13: 978-0127282510
  • Product Dimensions: 9.2 x 5.9 x 1.7 inches
  • Shipping Weight: 3 pounds
  • Amazon Best Sellers Rank: #1,554,648 in Books (See Top 100 in Books)

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Inside This Book (learn more)
First Sentence:
The processes selected for review fall into the same four general categories as in the volume [1]: (1) physical methods of film deposition, (2) chemical methods of film deposition, (3) hybrid (i.e., physical-chemical) methods of film deposition, and (4) pattern delineation processes. Read the first page
Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
plasma excitation region, reduced temperature processing, plasma generation region, autograph method, chlorinated plasmas, gas dispersal rings, arc plasma deposition, reacted coatings, nonequilibrium glow discharges, screened probe, gettering surfaces, multiwafer systems, reactive evaporation process, thermodiffusion effects, accelerator grid, hydrogen plasma cleaning, ion plating processes, higher silanes, background gas atoms, laser microfabrication, photochemical deposition, photochemical vapor deposition, plasma enhancement, crystallographic etching, sputter ion plating
Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Thin Solid Films, Academic Press, New Jersey, Materials Research Society, Park Ridge, Noyes Publications, Solid State Technol, American Institute of Physics, Extended Abstracts, Semiconductor International, Physics of Thin Films, International Conference, San Diego, General Considerations, John Wiley, Laser-Controlled Chemical Processing of Surfaces, Applied Materials, Monte Carlo, Plenum Press, Elsevier Sequoia, Handbook of Plasma Processing Technology, Lam Research, Beam-Induced Chemical Processes, Better Ceramics
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