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4.0 out of 5 stars
Not really a lot of overlap with earlier thin film handbooks..., November 7, 2007
This review is from: Thin Film Technology Handbook (Hardcover)
For the basics, I believe Maissel and Glang's Handbook of Thin Film Technology has much more information and goes into much greater detail about basic techniques (vacuum methods, evaporation, sputtering, etc.). In my opinion, this newer handbook can be seen as an addendum to the above 1970-era work. There are nice chapters on thin film optical materials by Angus Macleod and semiconductor thin films by Larry Kazmerski, true experts in these areas. I found the chapter on diamond films interesting also. Most chapters have more of a survey than an in-depth feel. Not to nit-pick, but as an example, when counting sheet resistance squares in the design of a meander-type resistor, this book reports a corner square as 0.5 when it is actually 0.559, and while a 10% error is not such a big deal for back-of-the envelope estimation, most thin film resistors are used in precision circuits where such error levels are important. Overall, although pricey, I think it is a nice addition to your library if you deal with thin films often. However, I would spend money to get a used copy of Thin Film Technology by Berry Hall and Harris or the above work by Maissel and Glang first.
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