First Sentence:
The relentless drive of the semiconductor industry to smaller device dimensions continues to present new challenges for all the enabling fabrication technologies, and in particular to microlithography.
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Key Phrases - Statistically Improbable Phrases (SIPs):
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interconfigurational transitions, pumping fluence, feedback laser cavity, picosecond laser diode, gap dielectric crystals, seeding pulse, flat output coupler, confocal lens pair, phonon trapping, pump laser emission, electron collisional ionization, optogalvanic signals, free ion case, fluorine laser, optogalvanic effect, neon transitions, absorption cross section measurements, band oscillator strengths, mercury clusters, solarization effects, emission domain, vuv lasers, streak camera image, scintillation properties, modified fused silica
Key Phrases - Capitalized Phrases (CAPs):
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Chem Phys, Phys Rev, Opt Lett, Phys Chem, Quantum Electron, Appl Phys Lett, Opt Commun, New York, Appl Opt, Geophys Res, Anal Chem, Optical Society of America, Mol Phys, Planet Space Sci, Naval Research Laboratory, Hubble Space Telescope, John Wiley, Lincoln Laboratory, Mod Opt, Princeton University, Quant Electron, Sov Phys, Laser Phys, Advanced Solid State Lasers, Alloys Comp
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