This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.
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5.0 out of 5 stars
Ellipsometry,
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This review is from: A User's Guide to Ellipsometry (Hardcover)
If you are a novice in using ellipsometry you could not pick a better book. If you noticed that certain films, thicknesses or substrates give you problem in measurements with your single wavelength ellipsometer - you will find out why and how to come around them. The book is devided into two sections. The first section explains how ellipsometry works, treats you to its basic equations, and explains psi-del trajectories for singele and multiple dielectric and absorbing films. It also shows you the ellipsometer's limitations, null points. The second part consits of case studies. It shows you how to use an ellipsomter to measure very thin films (<50A), ellicit information about polimer etch residues, surface damage, etc.
4.0 out of 5 stars
Good Ellipsometer Intro Guide,
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This review is from: A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering) (Paperback)
This is a good book for starters. It provides a good introduction for what ellipsometry is and what information it provides, equations to understand how the this information, a breakdown of the equipment, and several case studies to understand how this can be used for more intricate samples. The only limit is that it is for a one wavelength, one angle instrument.
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First Sentence:
Electromagnetic waves and polarized light are treated in textbooks and reference books on optics. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
manual null instrument, fluoropolymer film, total reflection coefficients, ellipsometric parameters, ellipsometry data, plane parallel interfaces, using ellipsometry, substrate index, ellipsometry measurements, optical constants, ellipsometric data, rough layer, effective medium approximation, fast axis, ellipsometric measurements, damage layer, thinnest films, bottom film, oxide growth, absorbing film, slow axis, film growth, film index, single crystal silicon, complex index Key Phrases - Capitalized Phrases (CAPs): (learn more)
Surface Sci, Psi Figure, New York, Thin Solid Films, After Racanellil, Results Figure, Academic Press, After Hsial, Various Films New!
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Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Electromagnetic waves and polarized light are treated in textbooks and reference books on optics. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
manual null instrument, fluoropolymer film, total reflection coefficients, ellipsometric parameters, ellipsometry data, plane parallel interfaces, using ellipsometry, substrate index, ellipsometry measurements, optical constants, ellipsometric data, rough layer, effective medium approximation, fast axis, ellipsometric measurements, damage layer, thinnest films, bottom film, oxide growth, absorbing film, slow axis, film growth, film index, single crystal silicon, complex index Key Phrases - Capitalized Phrases (CAPs): (learn more)
Surface Sci, Psi Figure, New York, Thin Solid Films, After Racanellil, Results Figure, Academic Press, After Hsial, Various Films New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 12
books:
See all 12 books this book cites
- Handbook of Optical Constants of Solids, Five-Volume Set: Handbook of Optical Constants of Solids: Volume 1 (Academic Press Handbook) by Edward D. Palik in Back Matter (1), and Back Matter (2)
- The Theory of Optics (Dover Books on Physics) by Paul Drude on page 34, and Back Matter
- Plasma Deposited Thin Films by J. Mort on page 167
- Fundamentals of Optics by Francis Jenkins on page 18
- Plasma etching and reactive ion etching (American Vacuum Society monograph series) by J. W Coburn on page 179
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