Amazon.com: Plasma etching and reactive ion etching (American Vacuum Society monograph series) (9780883184066): J. W Coburn, N. Rey Whetten: Books

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Plasma etching and reactive ion etching (American Vacuum Society monograph series) [Paperback]

J. W Coburn (Author), N. Rey Whetten (Editor)

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Product Details

Paperback: 87 pages
Publisher: American Institute of Physics (1982)
Language: English
ISBN-10: 0883184060
ISBN-13: 978-0883184066
Product Dimensions: 9.7 x 6.8 x 0.2 inches
Shipping Weight: 9.6 ounces
Amazon Best Sellers Rank: #4,673,809 in Books (See Top 100 in Books)

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