The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.
Book Info
From basic scientific precepts to today's emerging applications, here is the most complete guide to thin film technology available. Spans the full spectrum of important topics. DLC: Thin film devices - Design and construction.