Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine products (Oxford Science Publications) (Hardcover)

by Norio Taniguchi (Editor), Tsuguo Kohno (Editor), Kazuo Maruyama (Editor), Kiyoshi Iizuka (Editor), Iwao Miyamoto (Editor), Toshio Dohi (Editor)

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Product Description
The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer)=0.0001m. Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm range. This is essential in the fabrication of extremely precise and fine parts.

About the Author
Norio Taniguchi is at Tokyo Science University. Tsuguo Kohno is at Tokyo Metropolitan Institute of Science and Technology. Maruyama is at Tokyo Institute of Technology.

Product Details

• Hardcover: 424 pages
• Publisher: Oxford University Press, USA (September 26, 1996)
• Language: English
• ISBN-10: 0198562837
• ISBN-13: 978-0198562832
• Product Dimensions: 10 x 7.7 x 1 inches
• Shipping Weight: 2.1 pounds (View shipping rates and policies)
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• Amazon.com Sales Rank: #4,129,722 in Books (See Bestsellers in Books)