Review
This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control
Product Description
Silicon sensors integrated with readout circuits on one chip are now being considered for a wide and growing range of applications. Technological compatibility constraints and the need for economic large-scale production are now the major concerns if these devices are to become widely used in industry and medicine. This is the first book to attempt to evaluate the real prospects and limitations of integrated silicon smart sensors. It provides a thorough introduction to and review of, the field, covering both technical and economic issues critical to the future success of this technology.
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First Sentence:
Research on silicon sensors started about 25 years ago as a kind of spin-off of mainstream research on silicon microelectronic technology and circuits [1.1]. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
smart sensor concept, piezoelectric zinc oxide films, epilayer doping concentration, epitaxial layer doping concentration, micromechanical layers, sensor industry, pressure sensor market, smart pressure sensor, zinc oxide layer, etch rate reduction, fabrication compatibility, deep boron diffusion, probe shank, sacrificial etching, price experience curve, bipolar processing, standard bipolar process, silicon sensors, lateral pnp transistor, surface micromachining process, stimulating sites, transduction effects, microelectronic process, stimulating probes, substrate doping concentration Key Phrases - Capitalized Phrases (CAPs): (learn more)
Ultrasonics Symp, Proceedings Transducers, San Francisco, Proceedings Eurosensors, Delft University, Nippon Denso, Signal Output, Silicon Valley, Electron Devices, International Conference, Proceedings of Sensors Expo, Technical Digest, Lattice Press, Twente University New!
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Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Research on silicon sensors started about 25 years ago as a kind of spin-off of mainstream research on silicon microelectronic technology and circuits [1.1]. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
smart sensor concept, piezoelectric zinc oxide films, epilayer doping concentration, epitaxial layer doping concentration, micromechanical layers, sensor industry, pressure sensor market, smart pressure sensor, zinc oxide layer, etch rate reduction, fabrication compatibility, deep boron diffusion, probe shank, sacrificial etching, price experience curve, bipolar processing, standard bipolar process, silicon sensors, lateral pnp transistor, surface micromachining process, stimulating sites, transduction effects, microelectronic process, stimulating probes, substrate doping concentration Key Phrases - Capitalized Phrases (CAPs): (learn more)
Ultrasonics Symp, Proceedings Transducers, San Francisco, Proceedings Eurosensors, Delft University, Nippon Denso, Signal Output, Silicon Valley, Electron Devices, International Conference, Proceedings of Sensors Expo, Technical Digest, Lattice Press, Twente University New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 7
books:
See all 7 books this book cites
1
book
cites this book:
- Digest of Technical Papers by IEEE International Pulsed Power Conference on page 109, and page 210
- Computer Science by C.S. French in Front Matter
- Computer Science by Carl French in Front Matter
- Automotive Sensory Systems (Road Vehicle Automation I) by C. Nwagboso on page 290
- Automotive Sensors, by Westbrook on page 291
See all 7 books this book cites
- Microsensors, MEMS and Smart Devices by Julian W. Gardner on page 302
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