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MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering (Hardcover)

~ (Author)
Key Phrases: analyte waste reservoir, primary unknown quantities, gripper structure, Multiple Choice, Descriptive Problems, Computational Problems (more...)
3.5 out of 5 stars  See all reviews (2 customer reviews)

List Price: $130.00
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Frequently Bought Together

MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering + Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems + Microsystem Design
Price For All Three: $257.05

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  • This item: MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering by Tai-Ran Hsu

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  • Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems by Ville Kaajakari

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Editorial Reviews

Product Description

Technology/Engineering/Mechanical

A bestselling MEMS text...now better than ever.

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

Other highlights of the Second Edition include:
*

Expanded coverage of microfabrication plus assembly and packaging technologies
*

The introduction of microgyroscopes, miniature microphones, and heat pipes
*

Design methodologies for thermally actuated multilayered device components
*

The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.


From the Back Cover

Technology/Engineering/Mechanical

A bestselling MEMS text...now better than ever.

An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering.

Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances.

Other highlights of the Second Edition include:

  • Expanded coverage of microfabrication plus assembly and packaging technologies

  • The introduction of microgyroscopes, miniature microphones, and heat pipes

  • Design methodologies for thermally actuated multilayered device components

  • The use of popular SU-8 polymer material

Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.


Product Details

  • Hardcover: 576 pages
  • Publisher: Wiley; 2 edition (March 17, 2008)
  • Language: English
  • ISBN-10: 0470083018
  • ISBN-13: 978-0470083017
  • Product Dimensions: 9.3 x 7.6 x 1.4 inches
  • Shipping Weight: 2.4 pounds (View shipping rates and policies)
  • Average Customer Review: 3.5 out of 5 stars  See all reviews (2 customer reviews)
  • Amazon.com Sales Rank: #1,035,980 in Books (See Bestsellers in Books)

More About the Author

Tai-Ran Hsu
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Customer Reviews

2 Reviews
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Average Customer Review
3.5 out of 5 stars (2 customer reviews)
 
 
 
 
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Most Helpful Customer Reviews

 
5.0 out of 5 stars This is an excellent resource for MEMS background information, March 31, 2009
By Michael A. Duvernois (Minneapolis, MN United States) - See all my reviews
(TOP 500 REVIEWER)    (REAL NAME)   
New in this edition are micro-fabricated gyroscopes and microphone elements, the latter of which is already appearing in consumer devices. The second edition updates modernize what was already an excellent book.

I'd recommend that if you're not sure about spending the money on the book that you use amazon's search inside this book and take a bit of a look. Much as you'd do in a bookstore, thumb through, search for a couple of items of interest, that sort of thing.
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1 of 2 people found the following review helpful:
2.0 out of 5 stars blah, April 4, 2009
By Andrew Swanson (Balto. DC Metro Area) - See all my reviews
Required for a class. I would have not bought otherwise. Full of mistakes and ambiguous wording. A nice waste of $100 or so.
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