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Handbook of Ellipsometry (Materials Science and Process Technology) by Harland Tompkins |
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Product Description
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
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Inside This Book
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First Sentence:
The concept of using light to measure the thickness of a thin film is quite old. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
ellipsometric psi, calculated model data, tabulated optical constants, optical constant spectra, measured optical data, resulting optical constants, thick photoresist film, ellipsometric spectra, ellipsometric data, prototypical analysis, determining optical constants, total reflection coefficient, roughness layer, absolute reflectance, delta data, spectroscopic ellipsometers, oxynitride film, variable model parameters, spectroscopic ellipsometry, metrology tools, polysilicon film, interference oscillations, reflectance data, thermal oxide, principal angle Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Academic Press, Handbook of Optical Constants of Solids, Sample Figure, North Holland, Sir Isaac Newton, Principles of Optics New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
The concept of using light to measure the thickness of a thin film is quite old. Read the first page Key Phrases - Statistically Improbable Phrases (SIPs): (learn more)
ellipsometric psi, calculated model data, tabulated optical constants, optical constant spectra, measured optical data, resulting optical constants, thick photoresist film, ellipsometric spectra, ellipsometric data, prototypical analysis, determining optical constants, total reflection coefficient, roughness layer, absolute reflectance, delta data, spectroscopic ellipsometers, oxynitride film, variable model parameters, spectroscopic ellipsometry, metrology tools, polysilicon film, interference oscillations, reflectance data, thermal oxide, principal angle Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Academic Press, Handbook of Optical Constants of Solids, Sample Figure, North Holland, Sir Isaac Newton, Principles of Optics New!
Books on Related Topics | Concordance | Text Stats Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Back Cover | Surprise Me!
Citations (learn more)
This book cites 11
books:
See all 11 books this book cites
- Handbook of Optical Constants of Solids: Volume 1 (Academic Press Handbook) by Edward D. Palik on 8 pages
- Principles of Optics: Electromagnetic Theory of Propagation, Interference and Diffraction of Light (7th Edition) by Max Born on 4 pages
- Numerical Recipes: The Art of Scientific Computing by William H. Press on page 22, page 107, and Back Matter
- Concepts of Classical Optics by John Strong on page 21, page 97, and Back Matter
- A Treatise on Optics by David Brewster on page 4, and page 21
See all 11 books this book cites
Books on Related Topics
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What Do Customers Ultimately Buy After Viewing This Item?
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58% buy the item featured on this page: Spectroscopic Ellipsometry and Reflectometry: A User's Guide $131.50 |
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28% buy A User's Guide to Ellipsometry $12.71 |
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6% buy Introduction to Modern Optics $11.53 |
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6% buy Handbook of Ellipsometry (Materials Science and Process Technology)$220.00 |
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