Fundamentals of Semiconductor Manufacturing and Process Control (Hardcover)

~ (Author), Costas J. Spanos (Author) "This book is concerned with the manufacturing of devices, circuits, and electronic products based on semiconductors..." (more)
Key Phrases: New York, John Wiley, Monte Carlo (more...)

Editorial Reviews

Review

"…offers insight into the IC manufacturing process…[to] the practicing engineer or interested professional." (IEEE Circuits & Devices Magazine, November/December 2006)

Product Description

A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design

Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process control, experimental design, process modeling, yield modeling, and CIM/CAM systems. Readers are introduced to both the theory and practice of all basic manufacturing concepts.

Following an overview of manufacturing and technology, the text explores process monitoring methods, including those that focus on product wafers and those that focus on the equipment used to produce wafers. Next, the text sets forth some fundamentals of statistics and yield modeling, which set the foundation for a detailed discussion of how statistical process control is used to analyze quality and improve yields.

The discussion of statistical experimental design offers readers a powerful approach for systematically varying controllable process conditions and determining their impact on output parameters that measure quality. The authors introduce process modeling concepts, including several advanced process control topics such as run-by-run, supervisory control, and process and equipment diagnosis.

Critical coverage includes the following:
* Combines process control and semiconductor manufacturing
* Unique treatment of system and software technology and management of overall manufacturing systems
* Chapters include case studies, sample problems, and suggested exercises
* Instructor support includes electronic copies of the figures and an instructor's manual

Graduate-level students and industrial practitioners will benefit from the detailed exami?nation of how electronic materials and supplies are converted into finished integrated circuits and electronic products in a high-volume manufacturing environment.

An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.

An Instructor Support FTP site is also available.

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Product Details

• Hardcover: 488 pages
• Publisher: Wiley-IEEE Press (May 22, 2006)
• Language: English
• ISBN-10: 0471784060
• ISBN-13: 978-0471784067
• Product Dimensions: 9.4 x 6.1 x 1.1 inches
• Shipping Weight: 1.5 pounds (View shipping rates and policies)
• Average Customer Review: 4.0 out of 5 stars  See all reviews (2 customer reviews)
• Amazon.com Sales Rank: #699,734 in Books (See Bestsellers in Books)

Customer Reviews

Most Helpful Customer Reviews

8 of 10 people found the following review helpful:

4.0 out of 5 stars extensive summary of fabs, July 6, 2006

By	W Boudville (Terra, Sol 3) - See all my reviews (TOP 10 REVIEWER)    (REAL NAME)

For those of you working in a fab, or designing processes to be used in it, May gives a good summary of what is generally known and non-proprietary. He explains the key steps in photolithography, wet and dry etching, the different ways to dope, and deposition processes.

But along with these steps, every fab needs to monitor them for quality control. So we get discussions of how to measure data about a wafer. Like using inteferometry or ellipsometry to measure the thickness of a deposited thin film. Or using a four point probe for capacitance or resistance measurements.

A lot of the text also deals with statistics and how to maximise your device yield. Involves numerous modelling choices and process controls.

4.0 out of 5 stars Good to take the overview of SPC and Semiconductor processes, March 6, 2008

By	K. UMEDA "2008" - See all my reviews (REAL NAME)

The beginning chapters cover the semiconductor processes, and the last half chapters cover fundamental level of Statistical Process Control. Some explanations about the SPC are not sufficient because of the limited pages, compared to books of SPC. However, this book contains a lot of useful tables, and it is a good size to carry around. Thus, I think this is a good book to review SPC and Semiconductor Processes quickly.