Handbook of Thin Film Process Technology [ILLUSTRATED] (Hardcover)

by David A. Glocker (Editor), S. Ismat Shah (Editor)

Editorial Reviews

Review
"... this will certainly be the most comprehensive and current database of the large quantity of practical information available to the thin film community, by covering the wide range of applications ... Furthermore the unique update service should certainly stimulate and encourage communication between scientists, engineers and technologists ..." -- Vacuum

"The Handbook of Thin Film Process Technology will provide an authoritative reference source and practical guide for a range of users, including scientists and technicians working in universities and in industrial R&D. It will also be a treasure chest for graduate students embarking on thin-film research and an excellent source for teachers seeking material for final-year undergraduate projects" -- Physics World

"The handbook covers the whole scope of the subject of thin film technologies ... it will be a very useful addition to the library for all involved in the science ... of thin film technologies and their applications. Strong recommend!" -- The C.A.M.S.T. Record

"The handbook is not so much a book as a reference library ... [it] represents a remarkable assembly of current, largely first-hand, knowledge. Although the emphasis is on the processes and materials that lead to applications and devices, enough basic physics and chemistry is provided for non-specialists to find their way" -- Physics World

Product Description
This reference covers the most important thin film deposition techniques, as well as aspects of film processing and the major diagnostic techniques for in-process monitoring. It presents deposition system details and process parameters for a range of common materials and processes.

Product Details

• Hardcover: 1050 pages
• Publisher: Institute of Physics Publishing; Lslf edition (October 1995)
• Language: English
• ISBN-10: 0750303115
• ISBN-13: 978-0750303118
• Product Dimensions: 20 x 14 x 5 inches
• Shipping Weight: 15 pounds
• Average Customer Review: No customer reviews yet. Be the first.
• Amazon.com Sales Rank: #6,033,331 in Books (See Bestsellers in Books)