Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition (Hardcover)

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Editorial Reviews

Review

The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication.
-Diane Kauzlarick, EET

Product Description

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.New in the Second EditionoRevised chapters that reflect the many recent advances in the fieldoUpdated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology oIn-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.oMany more links to the WeboProblem sets in each chapter

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Product Details

• Hardcover: 752 pages
• Publisher: CRC; 2 edition (March 13, 2002)
• Language: English
• ISBN-10: 0849308267
• ISBN-13: 978-0849308260
• Product Dimensions: 11.1 x 8.6 x 1.8 inches
• Shipping Weight: 4.4 pounds (View shipping rates and policies)
• Average Customer Review: 4.3 out of 5 stars  See all reviews (6 customer reviews)
• Amazon.com Sales Rank: #472,071 in Books (See Bestsellers in Books)

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  #23 in	Books > Computers & Internet > Computer Science > Circuitry > Circuit Manufacturing
  #24 in	Books > Computers & Internet > Computer Science > Circuitry > Microelectronic Devices

Customer Reviews

Most Helpful Customer Reviews

18 of 22 people found the following review helpful:

5.0 out of 5 stars Fundamentals of Microfabrication, May 27, 2000

By	Adisorn Tuantranont (Boulder, CO, USA) - See all my reviews

This review is from: Fundamentals of Microfabrication (Hardcover)

This book helps you explore the world of micromachines and miniaturization. First 6 chapters review and explain the methodogy of microfabrications including micromachining technologies available today. Chapter 7 compares traditional and non-traditional microfabrication tools for different applications. New device development and hot topics of micromachined packaging are explored in chapter 8. Nice up-to-date list of hyperlinked documents from all around the world is placed at the end of the book for futher exploring the world of micromachining and microfabrication.

3.0 out of 5 stars Ok but not great, November 1, 2009

By	Alex Martini (Michigan, USA) - See all my reviews (REAL NAME)

Amazon Verified Purchase

This review is from: Fundamentals of Microfabrication (Hardcover)

The book was described as "used - very good", but arrived with the a damaged binding. It may have been damaged during shipping, as it was only packed in a manilla envelope. I let their customer services folks know a couple weeks ago, but never heard anything back from them. The actual pages are fine, so it's good enough for me to use for the class I bought it for, but I don't think this seller is really my first choice in the future.

5.0 out of 5 stars "There's plenty of room at the bottom.", April 24, 2009

By	Michael A. Duvernois (Minneapolis, MN United States) - See all my reviews (TOP 1000 REVIEWER)    (REAL NAME)

Feynman noted that back in 1959. Nanotechnology, MEMS, microfluidics, labs on a chip, and NEMS have all gotten a lot of press more recently. This encyclopedic book remains the bible of manufacturing at the very small scale. I do not know of a replacement book yet, though some sections of this one are getting quite dated, especially, as noted in another review, the clean room section.