From the reviews:
"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). a ] the book provides a fairly complete view of the modeling of microfabrication processes. a ] a ~It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applicationsa (TM)." (GrA(c)gory Guisbiers, Physicalia, Vol. 26 (1), 2004)
Product Description
Mathematical Modelling of Microfabrication Systems addresses the modelling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in focusing on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development related to high aspect ratio microfabrication technology.
