Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May |
by Peter Van Zant
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Handbook of Semiconductor Manufacturing Technology, Second Edition by Robert Doering |
by Michael Quirk
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by James L. Turley
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Product Description
This handbook will provide engineers with the principles, applications, and solutions needed to design and manage semiconductor manufacturing operations. Consolidating the many complex fields of semiconductor fundamentals and manufacturing into one volume by deploying a team of world class specialists, it allows the quick look up of specific manufacturing reference data across many subdisciplines.
From the Back Cover
WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS
This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including:
- Yield Management
- Automated Material Handling System
- Fab and Cleanroom Design and Operation
- Gas Abatement and Waste Treatment Management
- And much more
Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field.
STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES:
SEMICONDUCTOR FUNDAMENTALS
How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask
WAFER PROCESSING TECHNOLOGIES
Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning
FINAL MANUFACTURING
Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing
NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS
Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water
FAB YIELD, OPERATIONS, AND FACILITIES
Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems
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Inside This Book
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ion implantation technology, ultrapure water, toxic gas ordinance Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Six Sigma, International Conference, United States, Courtesy of Entegris, Academic Press, Federal Standard, Journal Vacuum Science Technology, San Diego, Plasma Sources Science Technology, San Jose, Applied Materials, Kluwer Academic Publishers, Solid State Technol, John Wiley, Semiconductor International, Micro Magazine, Handbook of Advanced Plasma Processing Techniques, Badge Color, New Jersey, Journal of Applied Physics, International Interconnect Technology Conference, Courtesy of Fraunhofer, Negative Organic, Rolling Meadows Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Surprise Me!
ion implantation technology, ultrapure water, toxic gas ordinance Key Phrases - Capitalized Phrases (CAPs): (learn more)
New York, Six Sigma, International Conference, United States, Courtesy of Entegris, Academic Press, Federal Standard, Journal Vacuum Science Technology, San Diego, Plasma Sources Science Technology, San Jose, Applied Materials, Kluwer Academic Publishers, Solid State Technol, John Wiley, Semiconductor International, Micro Magazine, Handbook of Advanced Plasma Processing Techniques, Badge Color, New Jersey, Journal of Applied Physics, International Interconnect Technology Conference, Courtesy of Fraunhofer, Negative Organic, Rolling Meadows Browse Sample Pages:
Front Cover | Table of Contents | First Pages | Index | Surprise Me!
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44% buy the item featured on this page: Semiconductor Manufacturing Handbook (McGraw-Hill Handbooks) |
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15% buy The Essential Guide to Semiconductors $32.84 |
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14% buy Handbook of Semiconductor Manufacturing Technology, Second Edition $104.58 |
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