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Chemical Mechanical Planarization of Semiconductor Materials 2004th Edition

5.0 out of 5 stars 2 customer reviews
ISBN-13: 978-3540431817
ISBN-10: 3540431810
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Product details

  • Hardcover: 428 pages
  • Publisher: Springer; 2004 edition (March 19, 2004)
  • Language: English
  • ISBN-10: 3540431810
  • ISBN-13: 978-3540431817
  • Product Dimensions: 9.2 x 1.1 x 6.1 inches
  • Shipping Weight: 2.2 pounds (View shipping rates and policies)
  • Average Customer Review: 5.0 out of 5 stars 2 customer reviews
  • Amazon Best Sellers Rank: #2,735,084 in Books (See Top 100 in Books)
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June 8, 2014
Format: Hardcover|Verified Purchase
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May 24, 2005
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