Enter your mobile number or email address below and we'll send you a link to download the free Kindle App. Then you can start reading Kindle books on your smartphone, tablet, or computer - no Kindle device required.
To get the free app, enter your mobile phone number.
High k Gate Dielectrics (Series in Materials Science and Engineering) 0th Edition
Use the Amazon App to scan ISBNs and compare prices.
Featured Titles in Springer Engineering
Explore these featured engineering resources from Springer.
Top Customer Reviews
*The need for high-k gate dielectrics and materials requirement
*Deposition techniques - ALCVD, MOCVD, PLD, MBE,
Physico-chemical characterization, X-ray and electron spectroscopies, Oxygen diffusion and thermal stability , Defect characterization by ESR, Band alignment determined by photo-injection , Electrical characteristics Theory
Theory of defects in high-k materials, Bonding constraints and defect formation at Si/high-k interfaces, Band alignment calculations, Electron mobility at the Si/high-k interface, Model for defect generation during electrical stress
Device integration issues, Device concepts for sub-100 nm CMOS technologies, Transistor characteristics, Non-volatile memories based on high-k ferroelectric layers
The drive towards smaller and smaller electronic componentry has huge implications for the materials currently being used. Conventional materials will be unable to function at scales much smaller than those in current use, as quantum mechanical effects will begin to dominate. For this reason new materials with higher electrical permittivity will be required, and this is a subject of intensive research activity within the microelectronics community.
This book reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the first chapter describes the various deposition techniques used for construction of layers at these dimensions. The second chapter considers characterization techniques of the physical, chemical, structural and electronic properties of these materials.Read more ›