- Hardcover: 496 pages
- Publisher: Small Gear Publishing (March 17, 2009)
- Language: English
- ISBN-10: 0982299109
- ISBN-13: 978-0982299104
- Product Dimensions: 7 x 1.1 x 10 inches
- Shipping Weight: 2.2 pounds (View shipping rates and policies)
- Average Customer Review: 11 customer reviews
- Amazon Best Sellers Rank: #388,865 in Books (See Top 100 in Books)
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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
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